Online measurement system for monitoring ring tool misalignments

Tong Xie; John E. Greivenkamp

doi:10.1117/12.295150

1 November 1997 Online measurement system for monitoring ring tool misalignments

Tong Xie, John E. Greivenkamp

Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997) https://doi.org/10.1117/12.295150
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool misalignments in the ring grinding setup for the Opticam surface generator. A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.

Citation Download Citation

Tong Xie and John E. Greivenkamp "Online measurement system for monitoring ring tool misalignments", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.295150

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