Stitching interferometer for large plano optics using a standard interferometer

Michael Bray

doi:10.1117/12.295153

1 November 1997 Stitching interferometer for large plano optics using a standard interferometer

Michael Bray

Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997) https://doi.org/10.1117/12.295153
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The manufacture of modern optical components often requires the se of high performance interferometers, usually based on phase-shifting techniques. However, there is currently no commercial phase-shifting interferometer having the capacity to measure large parts, such as those found in inertial confinement lasers and other large systems, with the required high spatial resolution. In order to circumvent the restrictions on the size of standard interferometers, we have designed and built a stitching interferometer for large plano surfaces, using a standard commercial 'small' diameter phase-shifting interferometer. The system is completely automated, using a PC computer to acquire and stitch measurements together to produce the original large surface. The advantages of this technique are low cost, small size, and preservation of spatial resolution. Also, smaller propagation distance means better handling of the smaller spatial periods. One such system has been in actual use for the characterization of large size mirrors since December 1994. In this paper, we shall look at the design of the system and produce, as an example, actual measurements performed on a PHEBUS laser slab polished more than a decade ago. The interferogram shows extraordinary features never seen before in such detail.

Citation Download Citation

Michael Bray "Stitching interferometer for large plano optics using a standard interferometer", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.295153

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