Scanning laser method for measuring surface morphology

Sidney Weiser

doi:10.1117/12.287803

26 September 1997 Scanning laser method for measuring surface morphology

Sidney Weiser

Proceedings Volume 3141, Scattering and Surface Roughness; (1997) https://doi.org/10.1117/12.287803
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

This method uses a coherent laser beam to scan a point on the sample from all azimuth angles, at either a fixed or a variable angle of incidence, completing one revolution in approximately 8 milliseconds. The data, collected by reflection from the sample, is reduced by special algorithms to obtain quantitative data related to light detected on axis. For crystals which have been suitably processed, it is feasible to determine the Miller Index and the lattice plane orientation of the atoms and to quantitatively measure other crystal parameters such as microtwinning. For thin films, this method can detect anomalies in reflectance with azimuth direction to help identify characteristics and for quality control. For single point diamond machined surfaces, the signatures obtained can help determine tool wear non- destructively. A program has also been developed to perform area scans which yield information on extended surface roughness characteristics using back reflection and interference phenomena. This information is recorded and displayed in graphics and data printouts in a number of formats appropriate for use in both research and manufacturing applications.

Citation Download Citation

Sidney Weiser "Scanning laser method for measuring surface morphology", Proc. SPIE 3141, Scattering and Surface Roughness, (26 September 1997); https://doi.org/10.1117/12.287803

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