Intelligent sensors for the next century

Yongling Wang

doi:10.1117/12.300640

20 February 1998 Intelligent sensors for the next century

Yongling Wang

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300640
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

Functional ceramics have become a news stage with the concept that different kinds of materials, no matter they are organic or inorganic with different functional effects, can be composed together to find a new material by multilayer thin film technologies. In this paper the design of new creative sensors, devices and system is proposed, which is based on: (1) Variation of spontaneous polarization P_s which can be induced or attended to maximum change during phase transformation; (2) Functional thin film materials which can be induced phase transitions by applied stress, temperature or electric field and these exhibit extraordinary piezoelectric, pyroelectric, electrostrictive, electro-optic, etc. and field effect properties in comparison with bulk materials so far existed; (3) Composite of these effects through thin film integrated technology to design new intelligent sensors; (4) Connecting equivalent circuits of functional elements, devices and electronic circuits to design new intelligent systems. As an example, a pyroelectric voltage transformer was introduced. The principle demonstration and experimental results are discussed.

Citation Download Citation

Yongling Wang "Intelligent sensors for the next century", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300640

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