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Technologies enabling low-dissipation designs for uncooled array IR sensors are offered. The technique involves the etching of special buffer layers from under a 1-micrometers membrane followed by deposition of an IR-sensitive film and electrode structure. The electrical and physical properties of plumbum-zirconate-titanate, barium titanate, tetraaminodiphenyl, polyvinylidene fluoride pyroelectric films are compared. A circuit for sensing pyroelectric signals in a CCD is considered.
Eugeny Ph. Pevtsov,Eugeny G. Elkin, andMarina A. Pospelova
"Integrated uncooled array IR sensors", Proc. SPIE 3200, Third Conference on Photonic Systems for Ecological Monitoring, (11 August 1997); https://doi.org/10.1117/12.284744
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Eugeny Ph. Pevtsov, Eugeny G. Elkin, Marina A. Pospelova, "Integrated uncooled array IR sensors," Proc. SPIE 3200, Third Conference on Photonic Systems for Ecological Monitoring, (11 August 1997); https://doi.org/10.1117/12.284744