Physical and chemical sensing using monolithic semiconductor optical transducers

Hans P. Zappe; Daniel Hofstetter; Bernd Maisenhoelder; Michael Moser; Peter Riel; Rino E. Kunz

doi:10.1117/12.284563

2 September 1997 Physical and chemical sensing using monolithic semiconductor optical transducers

Hans P. Zappe, Daniel Hofstetter, Bernd Maisenhoelder, Michael Moser, Peter Riel, Rino E. Kunz

Proceedings Volume 3226, Microelectronic Structures and MEMS for Optical Processing III; (1997) https://doi.org/10.1117/12.284563
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

We present two monolithically integrated optical sensor systems based on semiconductor photonic integrated circuits. These compact, robust and highly functional transducers perform all necessary optical and electro-optical functions on-chip; extension to multi-sensor arrays is easily envisaged. A monolithic Michelson interferometer for high-resolution displacement measurement and a monolithic Mach-Zehnder interferometer for refractometry are discussed.

Citation Download Citation

Hans P. Zappe, Daniel Hofstetter, Bernd Maisenhoelder, Michael Moser, Peter Riel, and Rino E. Kunz "Physical and chemical sensing using monolithic semiconductor optical transducers", Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); https://doi.org/10.1117/12.284563

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