Miniature uncooled infrared sensitive detectors for in-vivo biomedical applications

Panos G. Datskos; Stavros G. Demos; Slobodan Rajic

doi:10.1117/12.308020

1 May 1998 Miniature uncooled infrared sensitive detectors for in-vivo biomedical applications

Panos G. Datskos, Stavros G. Demos, Slobodan Rajic

Proceedings Volume 3253, Biomedical Sensing and Imaging Technologies; (1998) https://doi.org/10.1117/12.308020
Event: BiOS '98 International Biomedical Optics Symposium, 1998, San Jose, CA, United States

Abstract

Broadband IR radiation detectors have been developed using miniature, inexpensive, mass produced microcantilevers capable of detecting temperature differences as small as 10^-6 K. Microcantilevers made out of semiconductor materials with dimensions of 50 to 200 micrometers long, 10 to 30 micrometers wide and 0.4 to 4 micrometers thick, undergo bending when exposed to IR radiation and can be used either as uncooled photon or thermal detectors. Mounted on a probe 1 mm in diameter a number of microcantilevers can be accommodated in the working channel of existing endoscopes for in vivo proximity focus measurements inside the human body.

Citation Download Citation

Panos G. Datskos, Stavros G. Demos, and Slobodan Rajic "Miniature uncooled infrared sensitive detectors for in-vivo biomedical applications", Proc. SPIE 3253, Biomedical Sensing and Imaging Technologies, (1 May 1998); https://doi.org/10.1117/12.308020

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