MEMS design rule checking: a batch approach for remote operation

Victor R. Yarberry

doi:10.1117/12.320190

20 July 1998 MEMS design rule checking: a batch approach for remote operation

Victor R. Yarberry

Proceedings Volume 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS; (1998) https://doi.org/10.1117/12.320190
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

This paper describes a design rule checking (DRC) tool developed as an aid for designing microelectromechanical structures (MEMS) using AutoCAD^TM running on a Windows NT workstation. The application suite, MEMSdrc, consists of a graphical user interface integrated into AutoCAD^TM to invoke DRC, translation and interface software to communicate with a commercial IC layout design checking software package, and routines to interactively display and review the results. The user interface provides the capability to select a checking window area and specific DRC rules to be applied to the design. The MEMS structures, defined as 2D AutoCAD^TM geometry are translated first into DXF format, then to GDSII format. A remote process transfers the files to a Unix workstation where Mentor Graphics ICverify is invoked to perform the layout design rule checks. Upon completion, the results are translated into DXF geometry and returned back to the Windows NT workstation to be overlaid onto the original design. A set of icons are provided for the user to interactively review the results inside of AutoCAD^TM using a first/next/previous technique.

Citation Download Citation

Victor R. Yarberry "MEMS design rule checking: a batch approach for remote operation", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320190

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