Advanced complementary color filter technology without dyeing process for CCD image sensors

Hiromitsu Aoki; Kenji Yokozawa; Nobuyuki Waga; Tomoko Ohtagaki; Yoshiaki Nishi; Hirotatsu Kodama; Yoshikazu Sano; Sumio Terakawa

doi:10.1117/12.312376

29 June 1998 Advanced complementary color filter technology without dyeing process for CCD image sensors

Hiromitsu Aoki, Kenji Yokozawa, Nobuyuki Waga, Tomoko Ohtagaki, Yoshiaki Nishi, Hirotatsu Kodama, Yoshikazu Sano, Sumio Terakawa

Author Affiliations +

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312376
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

Advanced complementary color filter technology without dyeing process has been developed to simplify color filter fabrication process and to improve UV-resistance and thermal stability of color filter for CCD image sensors and CMOS image sensors. Using this advanced technology, complementary color filter is able to be fabricated by conventional lithography process with usual TMAH developer. This technology has achieved fine resolution of less than 1.5 micrometers lines and spaces in spite of previous inclusion of complementary colorings within the photo-sensitive polymers. These photo-sensitive polymers are negative type and consist of five key elements. The performance of the color filter characteristics that UV-resistance is more than 30 million lux-hour and thermal stability is more than 250 degree(s)C, has been realized by the advanced technology. Consequently this technology has been applied to 1/4-inch CCD image sensors, the optical color characteristics of the CCD image sensors has been achieved nearly same and good color spectrums as the conventional one.

Citation Download Citation

Hiromitsu Aoki, Kenji Yokozawa, Nobuyuki Waga, Tomoko Ohtagaki, Yoshiaki Nishi, Hirotatsu Kodama, Yoshikazu Sano, and Sumio Terakawa "Advanced complementary color filter technology without dyeing process for CCD image sensors", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312376

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