Oxygen concentration distribution determination in silicon wafers by semiconductor IR laser spectroscopy

Sergey D. Darchuk; Fiodor F. Sizov

doi:10.1117/12.306260

20 April 1998 Oxygen concentration distribution determination in silicon wafers by semiconductor IR laser spectroscopy

Sergey D. Darchuk, Fiodor F. Sizov

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306260
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

IR laser spectral analysis was applied for rapid determination of oxygen concentration and its distribution in silicon wafers at room temperature by the method of scanning semiconductor laser spectroscopy. Pb_1-xSn_xTe injection lasers, the emitting wavelength of which was changed in the region of (lambda) equals 9.1 micrometers by current impulses of different duration and amplitude, were used. The whole square under an absorption curve to determine the absorption coefficient by all the oxygen complexes and then to evoke the oxygen concentration was taken into account. The possibility to reveal even at room temperature by the method applied the oxygen complexes of different configuration was demonstrated.

Citation Download Citation

Sergey D. Darchuk and Fiodor F. Sizov "Oxygen concentration distribution determination in silicon wafers by semiconductor IR laser spectroscopy", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306260

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available