Photoacoustic techniques for determination of thresholds of failure during laser processing of substrate materials for integrated electronics

Sergiy M. Baschenko; Ivan V. Blonskij; Viacheslav M. Puzikov; Oleg Ya. Dan'ko; Alexander G. Filin

doi:10.1117/12.306272

20 April 1998 Photoacoustic techniques for determination of thresholds of failure during laser processing of substrate materials for integrated electronics

Sergiy M. Baschenko, Ivan V. Blonskij, Viacheslav M. Puzikov, Oleg Ya. Dan'ko, Alexander G. Filin

Author Affiliations +

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306272
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

Possibility of application of the photoacoustic methods for determination of threshold of failure of plates caused by power light pulses (up to 300 MW/mm²) of the excimer XeCl* laser is demonstrated. The original system on the basis of the XeCl* laser for a high-precision processing of sapphire plates and other construction materials is developed.

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Sergiy M. Baschenko, Ivan V. Blonskij, Viacheslav M. Puzikov, Oleg Ya. Dan'ko, and Alexander G. Filin "Photoacoustic techniques for determination of thresholds of failure during laser processing of substrate materials for integrated electronics", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306272

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