Single-pulse high-resolution x-ray contact microscopy with an advanced epoxy novolac resist

Panagiotis Argitis; Alkiviadis Constantinos Cefalas; Z. Kollia; Evangelia Sarantopoulou; Thomas W. Ford; Tony Stead; A. Marranca; Colin N. Danson; J. Knott; David Neely

doi:10.1117/12.316626

14 July 1998 Single-pulse high-resolution x-ray contact microscopy with an advanced epoxy novolac resist

Panagiotis Argitis, Alkiviadis Constantinos Cefalas, Z. Kollia, Evangelia Sarantopoulou, Thomas W. Ford, Tony Stead, A. Marranca, Colin N. Danson, J. Knott, David Neely

Author Affiliations +

Proceedings Volume 3423, Second GR-I International Conference on New Laser Technologies and Applications; (1998) https://doi.org/10.1117/12.316626
Event: Second GR-I International Conference on New Laser Technologies and Applications, 1997, Olympia, Greece

Abstract

We report on the use of an epoxy novolac chemically amplified photoresist, to get x-ray images of living biological species in the water window of soft x-rays. This photoresist response was at least two orders of magnitude 'faster' than the standard used PMMA in contact x-ray microscopy. Atomic force microscopy of the resist, relief images obtained with biological specimen masking, suggests a resolution better than 300 nm in lateral dimensions - the size of the cell flagellas - and 20 nm in depth profiles.

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Panagiotis Argitis, Alkiviadis Constantinos Cefalas, Z. Kollia, Evangelia Sarantopoulou, Thomas W. Ford, Tony Stead, A. Marranca, Colin N. Danson, J. Knott, and David Neely "Single-pulse high-resolution x-ray contact microscopy with an advanced epoxy novolac resist", Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); https://doi.org/10.1117/12.316626

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