Design and fabrication of micromirror array with hidden joint structures

Chang-Hyeon Ji; Yong-Kweon Kim

doi:10.1117/12.324284

2 September 1998 Design and fabrication of micromirror array with hidden joint structures

Chang-Hyeon Ji, Yong-Kweon Kim

Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998) https://doi.org/10.1117/12.324284
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

This paper describes the design and fabrication of surface- micromachined micromirror array with hidden joint structures. Instead of using elastic spring components, such as cantilevers, flexure beams, and torsion hinges, we have used joint structure composed of pin and staples to support the mirror plate. The position of the joint structure, under the mirror plate, makes large active surface area possible. Arrays of 100 X 110 micrometers ² sized micromirrors with two different staple shapes are designed and fabricated. These flexureless micromirrors are driven by electrostatic force between mirror plate and address electrode under it. As the mirror plate has discrete deflection angles the device is well suited for spatial light modulating purpose. Four-level metal structural layers and semi-cured photoresist sacrificial layers are used in the fabrication process and sacrificial layers are removed by dry release process using oxygen plasma. Performance characteristics are measured by applying voltage difference between the ground electrode, which contacts the mirror plate via support post, and an address electrode.

Citation Download Citation

Chang-Hyeon Ji and Yong-Kweon Kim "Design and fabrication of micromirror array with hidden joint structures", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); https://doi.org/10.1117/12.324284

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