Micromachined pressure sensor integrated with an imbalanced Mach-Zehnder waveguide on silicon for coherence modulation scheme

Henri Porte; Veronique Gorel; Jean-Pierre Goedgebuer

doi:10.1117/12.318200

13 August 1998 Micromachined pressure sensor integrated with an imbalanced Mach-Zehnder waveguide on silicon for coherence modulation scheme

Henri Porte, Veronique Gorel, Jean-Pierre Goedgebuer

Author Affiliations +

Proceedings Volume 3555, Optical and Fiber Optic Sensor Systems; (1998) https://doi.org/10.1117/12.318200
Event: Photonics China '98, 1998, Beijing, China

Abstract

We investigate theoretically and experimentally the principle of a micromachined pressure sensor integrated in silicon. The optical part of the sensor consists of an imbalanced Mach-Zehnder waveguide interferometer. The waveguide is formed by a silicon nitride layer of high refractive index set between two cladding layers of silicon dioxide of lower refractive index. The sensing part of the device consists in a set of membranes obtained by anisotropic etching of the back face of the substrate under the reference arm. The pressure variations applied to the membrane induce a geometrical deformation of the waveguide arm and modify the optical path difference between the arms. The non-linear variation of the phase versus the applied pressure is obtained from the spectral analysis of the channeled spectrum transmitted by the interferometer. The static optical path-delay introduced between the arms allows the sensor to be introduce din a coherence modulation scheme, which can result in a remote sensor system, involving an active demodulation.

Citation Download Citation

Henri Porte, Veronique Gorel, and Jean-Pierre Goedgebuer "Micromachined pressure sensor integrated with an imbalanced Mach-Zehnder waveguide on silicon for coherence modulation scheme", Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); https://doi.org/10.1117/12.318200

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available