Laser diffraction measurement

Duogang Ran

doi:10.1117/12.318384

10 August 1998 Laser diffraction measurement

Duogang Ran

Author Affiliations +

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318384
Event: Photonics China '98, 1998, Beijing, China

Abstract

In the first part of the paper, the distribution of pattern of single slit diffraction with Gaussian beam is discussed, that shows for ideal Fraunhofer diffraction with Gaussian beam the positions of diffraction minima append a nonlinear term compared with imiform coherent light diffraction and the pattern of Fresnel diffraction will approach to Fraunhofer 's as the order of pattern increases to high level. In the second part a improving scheme is introduced which can reduce all king of measuring noise and the nonlinear error arising from Gaussian beam and deviating from ideal Fraunhofer diffraction effectively. Two set of experiment results are presented in this part that shows the measuring accuracy can reach to Ad Id <0.2% and available range to the sizes to be measured can be extended to d =0.05 0.8mm without any adjusting and it can be extended to 0.025mm by simple adjusting. In additional, the scheme has very simple structure suitable for engineering application, especially for on-line measurement.

Citation Download Citation

Duogang Ran "Laser diffraction measurement", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318384

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