New pattern on fabrication of fiber spinnerets by LIGA technology

Shi Chang Tseng; C. T. Shi; Chia-Lung Kuo; Yu-chiao Cheng

doi:10.1117/12.341241

10 March 1999 New pattern on fabrication of fiber spinnerets by LIGA technology

Shi Chang Tseng, C. T. Shi, Chia-Lung Kuo, Yu-chiao Cheng

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341241
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

In the past, the capillaries of fiber-spinneret were made by drilling or by micro electro-discharge-machining. In this study a new process for manufacturing a spinneret die was developed. LIGA process provides the new method of capillary manufacturing. The diameter of the capillaries is 200 micrometers . and L/D ratio is 3. The stability during fiber spinning can be improved by using capillaries with higher aspect ratio. Details on micro-injection mold design, analysis, manufacturing and process conditions will be discussed. Better process conditions will be introduce through experiment design technology. Through single injection molding process, a 48-capillaries structure was formed. The diameter of each capillary was inspected along longitudinal direction carefully. The result shows that the accuracy of the diameter for each capillary can be controlled to be 200 +/- 1 micrometers range. Capillaries to spin w-shaped micro- fibers were also developed in this work. The width in each capillary is 100 micrometers with higher aspect ratio up to 16. With consequent treatments and electro-forming, the spinneret can be produced in the mass production way. A real metal spinneret die was electro-formed in this study. The technology developed here can also be used in the fabrication of MEMS components.

Citation Download Citation

Shi Chang Tseng, C. T. Shi, Chia-Lung Kuo, and Yu-chiao Cheng "New pattern on fabrication of fiber spinnerets by LIGA technology", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341241

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