Paper
10 March 1999 Positional accuracy study of a micro-EDM machine
Heather J. A. Almond, Jagmohan Bhogal, David M. Allen
Author Affiliations +
Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341183
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
Micro-electrodischarge machining is used to machine small features such as holes, cavities and slots with high aspect ratios in electrically-conductive materials for various applications including medical implants, printing devices, dies and spray nozzles. In this study, the positional accuracy of a micro-EDM machine was assessed while simulating the machining of an array of holes. The measurement involved the use of a diffraction grid plate and non-contact scanning head. This enabled various conclusions to be drawn as to the relative deviations experienced when machining small features such as (phi) 50 micrometers holes.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Heather J. A. Almond, Jagmohan Bhogal, and David M. Allen "Positional accuracy study of a micro-EDM machine", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341183
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Cited by 7 scholarly publications.
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KEYWORDS
Head

Electrodes

Dielectrics

Computer programming

Error analysis

Printing

Spindles

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