Testing philosophy behind the micro analysis system

Hans G. Kerkhoff

doi:10.1117/12.341224

10 March 1999 Testing philosophy behind the micro analysis system

Hans G. Kerkhoff

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341224
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Microsystem testing has to cope with many problems, resulting from inaccessibility, different technologies and non-electrical failure modes. Possible test techniques have been investigated to test a new advanced microsystem. The implementation form and application area highly contributes to the choices made.

Citation Download Citation

Hans G. Kerkhoff "Testing philosophy behind the micro analysis system", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341224

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