PROCEEDINGS VOLUME 3742
MICROELECTRONIC MANUFACTURING TECHNOLOGIES | 19-21 MAY 1999
Process and Equipment Control in Microelectronic Manufacturing
Editor(s): Kevin Yallup, Murali K. Narasimhan
Editor Affiliations +
MICROELECTRONIC MANUFACTURING TECHNOLOGIES
19-21 May 1999
Edinburgh, United Kingdom
Control of Process Equipment and Materials
N. Benesch, Claus Schneider, Wolfgang Lehnert, Lothar Pfitzner, Heiner Ryssel
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346230
Martin Fallon
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346240
Stephen McDade
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346247
Frank H. Szarka, John H. Givens, David Easterday
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346248
Cheng-Fu Hsu, W. C. Chang, Wei-Kun Yeh, Steve Lin
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346249
Statistical Process Control, Design of Experiments and Modeling
Jerry A. Stefani, Mike Anderson
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346250
Nien-Fan Zhang
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346251
Michael Pitter, Bernhard Doleschel, Ludwig Eibl, Erwin Steinkirchner, Andreas Grassmann
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346252
Mark Redford, Martin Fallon, Anthony J. Walton, Z. A. Shafi, Jim McGinty, Ian Underwood
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346231
Alastair McGibbon, Adil Shafi, Nigel Cameron, Chun Ng, Mark Redford
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346232
Henry Gerung, Vijay Chhagan, Pradeep R. Yelehanka, Mei-Sheng Zhou, Joe K. Hui
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346233
Martin Fallon, Keith Findlater, Jim McGinty, N. Rankin, A. Yarr
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346234
Vidar K. Nilsen, Anthony J. Walton
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346235
Control of Plasma Processes and Equipment
Gerard Petit
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346236
Hunsuk Kim, Fred Lewis Terry Jr.
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346237
Michel Derie
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346238
Poster Session
Delphine Emzivat, Claude Gagnadre, Eric Martin
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346239
John Ian Doohan, Martin Fallon, I. Thomson, Richard Boyle, J. Norval
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346241
Ting-Yih Lu, Yuan-Ko Hwang, Chia-Hung Lai, Sen-Fu Chen, Chia-Hsiang Chen
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346242
Chung-Daw Young, Sen-Fu Chen, Chia-Hsiang Chen
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346243
Vidar K. Nilsen, Anthony J. Walton
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346244
Statistical Process Control, Design of Experiments and Modeling
Fred Smits
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346245
Control of Process Equipment and Materials
David J. Robbins, Alan Marrs, Christopher Pickering, Allister W. Dann, John L. Glasper, John Russell
Proceedings Volume Process and Equipment Control in Microelectronic Manufacturing, (1999) https://doi.org/10.1117/12.346246
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