Optical integrated circuit for quality control

Delphine Emzivat; Claude Gagnadre; Eric Martin

doi:10.1117/12.346239

23 April 1999 Optical integrated circuit for quality control

Delphine Emzivat, Claude Gagnadre, Eric Martin

Proceedings Volume 3742, Process and Equipment Control in Microelectronic Manufacturing; (1999) https://doi.org/10.1117/12.346239
Event: Microelectronic Manufacturing Technologies, 1999, Edinburgh, United Kingdom

Abstract

Vision systems in quality control are increasingly widespread but are currently suffering from limitations in certain applications which concern as well their processing capability and their miniaturization. Today modern optics and electronics make it possible to consider integration of the sensors for acquisition and the processors for the image processing on a same circuit. The goal of this article is to present the broad outline of our sensor architecture and to formalize a motion detection method set up in a processor network optimized for a given algorithm.

Citation Download Citation

Delphine Emzivat, Claude Gagnadre, and Eric Martin "Optical integrated circuit for quality control", Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); https://doi.org/10.1117/12.346239

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