Cryogenic microcalorimeters and tunnel junctions for high-resolution energy dispersive x-ray spectrometry

Jens Hoehne; Michael Altmann; Godehard Angloher; Matthias Buehler; Franz v. Feilitzsch; Torsten Frank; Paul Hettl; Theo Hertrich; Josef Jochum; Tobias Nuessle; Stefan Pfnuer; Johann Schnagl; Stefanie Waenninger

doi:10.1117/12.346911

27 April 1999 Cryogenic microcalorimeters and tunnel junctions for high-resolution energy dispersive x-ray spectrometry

Jens Hoehne, Michael Altmann, Godehard Angloher, Matthias Buehler, Franz v. Feilitzsch, Torsten Frank, Paul Hettl, Theo Hertrich, Josef Jochum, Tobias Nuessle, Stefan Pfnuer, Johann Schnagl, Stefanie Waenninger

Author Affiliations +

Proceedings Volume 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing; (1999) https://doi.org/10.1117/12.346911
Event: Microelectronic Manufacturing Technologies, 1999, Edinburgh, United Kingdom

Abstract

We have been developing cryogenic detectors for astro- particle physics applications including search for Dark Matter, neutrino physics and x-ray astronomy. Most recently we started the development of high resolution x-ray detectors based on superconducting tunnel junctions and superconducting phase transition thermometers/transition edge sensors for microanalysis applications. Both types of sensors are being investigated as well as the cryogenic setup for applications on a scanning electron microscope.

Citation Download Citation

Jens Hoehne, Michael Altmann, Godehard Angloher, Matthias Buehler, Franz v. Feilitzsch, Torsten Frank, Paul Hettl, Theo Hertrich, Josef Jochum, Tobias Nuessle, Stefan Pfnuer, Johann Schnagl, and Stefanie Waenninger "Cryogenic microcalorimeters and tunnel junctions for high-resolution energy dispersive x-ray spectrometry", Proc. SPIE 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, (27 April 1999); https://doi.org/10.1117/12.346911

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available