Generic vibration criteria for vibration-sensitive equipment

Colin G. Gordon

doi:10.1117/12.363802

28 September 1999 Generic vibration criteria for vibration-sensitive equipment

Colin G. Gordon

Proceedings Volume 3786, Optomechanical Engineering and Vibration Control; (1999) https://doi.org/10.1117/12.363802
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The vibration criterion (VC) curves, commonly used in the design of facilities which house vibration-sensitive instruments and tools, were developed by the author and his colleagues, in the early 80's, published by SPIE in 1991 and by IEST in 1993. Each of the criterion curves A through E is associated with a 'line width' or 'detail size' which was an attempt by the authors to describe the capabilities of the tools with which each curve might be associated. In the years since the curves were developed there have been substantial developments in tool design and isolation. In this paper the curves are reviewed in the context of present-day tools and processes. Changes are proposed where these might be justified.

Citation Download Citation

Colin G. Gordon "Generic vibration criteria for vibration-sensitive equipment", Proc. SPIE 3786, Optomechanical Engineering and Vibration Control, (28 September 1999); https://doi.org/10.1117/12.363802

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available