Optical properties of ZnSe diffractive optical elements for spot array generation

Keiji Ebata; Keiji Fuse; Manabu Shiozaki; Tetsuya Hattori

doi:10.1117/12.360992

9 September 1999 Optical properties of ZnSe diffractive optical elements for spot array generation

Keiji Ebata, Keiji Fuse, Manabu Shiozaki, Tetsuya Hattori

Proceedings Volume 3823, Laser Metrology and Inspection; (1999) https://doi.org/10.1117/12.360992
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

The diffractive optical element (DOE) is a revolutionary technology for sophisticated optical systems. It has recently been launched within the optical industry, which is constantly seeking improvements over conventional optics. We have designed and fabricated three types of binary-phase DOE for array generation. The surface relief of a ZnSe substrate was patterned and etched with each intended phase distribution by using photolithography and reactive ion etching (RIE) technologies. The optical properties of anti-reflection coated samples were then examined by measuring the intensity distribution of their converging diffractive beams and the results compared with the calculated beam propagation.

Citation Download Citation

Keiji Ebata, Keiji Fuse, Manabu Shiozaki, and Tetsuya Hattori "Optical properties of ZnSe diffractive optical elements for spot array generation", Proc. SPIE 3823, Laser Metrology and Inspection, (9 September 1999); https://doi.org/10.1117/12.360992

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