Novel, highly sensitive chemical and biological sensors based on integrated MOEM and MEMS technologies

Fariborz Maseeh; Andrew Swiecki

doi:10.1117/12.361261

2 September 1999 Novel, highly sensitive chemical and biological sensors based on integrated MOEM and MEMS technologies

Fariborz Maseeh, Andrew Swiecki

Author Affiliations +

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361261
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

IntelliSense Corporation has designed, fabricated, and tested a chemical and biological sensor based on MOEM technology. The sensor is based on novel integrated optic technology. Data collected from the prototype device indicates sensor sensitivity at least three order of magnitude higher than conventional Mack Zhender interferometers. The application specific sensor can be used for single and multi-analyte detection. The design combines a sensing waveguide and a microfabricated fluid delivery system. This integration permits analyte samples to be transported to a reaction well in contact with the sensing surface. In the reaction well, immobilized reagents react with the analyte, changing the optical properties of the waveguide surface. Measuring this change for an array of reaction wells, the sensor selectively identifies the composition and concentration of test substances. The novel sensing technology is based on pairs of MOEM optical waveguides. For the tests conducted, laser light was coupled into the waveguides, and measured. Because the evanescent field of the propagating light penetrated the waveguide surface, the coupled light was affected by the waveguide surface. Changes in the waveguide surface created by analyte-reagent bonding were measured. Sensors based on the developed technology provide low cost, small, sensitive, and selective sensing solutions for chemical and biological applications.

Citation Download Citation

Fariborz Maseeh and Andrew Swiecki "Novel, highly sensitive chemical and biological sensors based on integrated MOEM and MEMS technologies", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361261

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KEYWORDS

Waveguides

Sensors

Microopto electromechanical systems

Microfluidics

Chemical analysis

Integrated optics

Microelectromechanical systems

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