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Performance limits of 10 kHz, 15 nsec-pulse diode-pumped solid- state laser in microdrilling of metals and ceramics were studied. Average drilling rates approaching 1 cm/sec with micrometer-range accuracy of micro-holes are achievable in steel and ceramic samples up to 1 mm thick. We found that shielding effects of plasma plume can be minimized by proper selection of laser intensity. In samples 1 mm and thicker, using third harmonic output allows drilling of high aspect ratio holes at almost an order of magnitude higher ablation rates as compared to IR laser output.
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Sergei V. Govorkov, Evgueni V. Slobodtchikov, Alexander O. Wiessner, Dirk Basting, "High-throughput micromachining of steel and ceramics with solid state UV laser," Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); https://doi.org/10.1117/12.407399