Automatic system for integrated reliability test on silicon pressure sensor

Yunhui Wang; Dexing Yi; Qingzhong Xiao; Shanci Wang

doi:10.1117/12.385613

9 May 2000 Automatic system for integrated reliability test on silicon pressure sensor

Yunhui Wang, Dexing Yi, Qingzhong Xiao, Shanci Wang

Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385613
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China

Abstract

This paper introduces a newly developed automatic system for reliability test of silicon pressure sensor. This system performs two functions: the dynamic cycling life test and the static parameter calibration of pressure sensors. This system makes it possible that the reliability test be carried through under the integrated stresses of temperature, electricity and dynamic pressure. And the failure pressure cycling times of each test samples can be determined accurately. All the static parameters of pressure sensors can be measured automatically and precisely by this system. Test results of some pressure sensors were presented.

Citation Download Citation

Yunhui Wang, Dexing Yi, Qingzhong Xiao, and Shanci Wang "Automatic system for integrated reliability test on silicon pressure sensor", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); https://doi.org/10.1117/12.385613

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