Paper
30 June 2000 Morphology and mechanical properties of oblique angle columnar thin films
Robert A. Knepper, Russell F. Messier
Author Affiliations +
Abstract
The anisotrophy of the morphology in oblique incidence, evaporated, columnar films has been studied previously only qualitatively, primarily by scanning electron microscopy. However, using atomic force microscopy and power spectral density analysis, new approaches are developed to quantify these anisotrophies in morphology in terms of their distribution functions of size, shape, spacing, and height. In addition, the biaxial stress of oblique angle columnar thin films prepared with varying angle of vapor incidence was measured by using a laser scanning method to determine changes in curvature. From this data, approaches to a quantitative model are proposed to describe the changes in morphology with varying angles of vapor incidence as related to ballistic aggregation and self-shadowing processes.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert A. Knepper and Russell F. Messier "Morphology and mechanical properties of oblique angle columnar thin films", Proc. SPIE 4097, Complex Mediums, (30 June 2000); https://doi.org/10.1117/12.390588
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Cited by 6 scholarly publications.
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KEYWORDS
Atomic force microscopy

Thin films

Anisotropy

Data modeling

Contrast transfer function

Monte Carlo methods

Scanning electron microscopy

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