Compact debris shutter design of a laser-produced plasma source for high-NA application

Masaki Yamamoto; Minaji Furudate; Norio Sato; Hirochi Takagi

doi:10.1117/12.406664

8 November 2000 Compact debris shutter design of a laser-produced plasma source for high-NA application

Masaki Yamamoto, Minaji Furudate, Norio Sato, Hirochi Takagi

Proceedings Volume 4146, Soft X-Ray and EUV Imaging Systems; (2000) https://doi.org/10.1117/12.406664
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

A compact debris shutter for use with a laser produced plasma source is designed for installation to our EUV interferometer. The shutter is for operation under vacuum based on a gyroscope design for space satellites. It is of a hollow cylinder shape of 20 cm diameter enabling to stop debris of the plasma source traveling at a speed below 260 m/s at a spinning speed of 6000 rpm.

Citation Download Citation

Masaki Yamamoto, Minaji Furudate, Norio Sato, and Hirochi Takagi "Compact debris shutter design of a laser-produced plasma source for high-NA application", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406664

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