RF MEMS microswitches design and characterization

Xavier Lafontan; Christian Dufaza; Michel Robert; Guy Perez; Francis Pressecq

doi:10.1117/12.395602

11 August 2000 RF MEMS microswitches design and characterization

Xavier Lafontan, Christian Dufaza, Michel Robert, Guy Perez, Francis Pressecq

Proceedings Volume 4175, Materials and Device Characterization in Micromachining III; (2000) https://doi.org/10.1117/12.395602
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

This paper presents the work performed in MUMPs on RF MEMS micro-switch. Concepts, design and characterization of switches are studied. The study particularly focuses on the electrical resistance characterization and modelization. The switches developed uses two different principle: overflowed gold and hinged beam. The realized contacts exhibited high on resistance (~20(Omega) ) due to nanoscopics asperities of contacts and insulating interfacial films. Results of a typical contact cleaning method are also presented.

Citation Download Citation

Xavier Lafontan, Christian Dufaza, Michel Robert, Guy Perez, and Francis Pressecq "RF MEMS microswitches design and characterization", Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); https://doi.org/10.1117/12.395602

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