High-accuracy absolute flatness testing using a commercial interferometer

Sen Han; Erik Novak

doi:10.1117/12.402815

6 October 2000 High-accuracy absolute flatness testing using a commercial interferometer

Sen Han, Erik Novak

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402815
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

In absolute interferometric flatness testing, various flats are measured in multiple configurations to approximately solve for the surface figure of each flat independent of the reference flat used. This measurement sequence generally involves rotation of one flat as well as removal and replacement with different flats. The deviation between the rotation center of the flat and the coordinate center of the software system used causes measurement errors, as do any errors in replacement location and general error sources associated with interferometry. In this paper techniques are described to optimize the accuracy of the three-flat absolute flat testing technique, and the various sources of measurement error are analyzed. Use of crosshairs for positioning and rotation adjustment as well as general methods to improve interferometric testing are described. Results from the high- accuracy absolute flat testing are compared with standard absolute flat results to evaluate how to achieve improved measurement results.

Citation Download Citation

Sen Han and Erik Novak "High-accuracy absolute flatness testing using a commercial interferometer", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402815

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