Technology trends in LPS technology and forecast for the future

Yukihiko Nakata; Akihiko Imaya; Yutaka Ishii

doi:10.1117/12.424887

30 April 2001 Technology trends in LPS technology and forecast for the future

Yukihiko Nakata, Akihiko Imaya, Yutaka Ishii

Proceedings Volume 4295, Flat Panel Display Technology and Display Metrology II; (2001) https://doi.org/10.1117/12.424887
Event: Photonics West 2001 - Electronic Imaging, 2001, San Jose, CA, United States

Abstract

The mobile display market has been changing with the evolution of the information technology. The display is trying to be more compact and more by integrating new functions. The LPS TFT Is one of the most expected technologies to realize the integrated circuits on the display panels. In this paper, the technologies of TFT-LCD are summarized and the future directions of the technology are discussed, mainly focused to the crystallization and the gate insulator formation.

Citation Download Citation

Yukihiko Nakata, Akihiko Imaya, and Yutaka Ishii "Technology trends in LPS technology and forecast for the future", Proc. SPIE 4295, Flat Panel Display Technology and Display Metrology II, (30 April 2001); https://doi.org/10.1117/12.424887

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