Optical measurement methods to study dynamic behavior in MEMS

Christian Rembe; Rishi Kant; Richard S. Muller

doi:10.1117/12.445595

23 October 2001 Optical measurement methods to study dynamic behavior in MEMS

Christian Rembe, Rishi Kant, Richard S. Muller

Author Affiliations +

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445595
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-more important to have precise measurements and visual means to characterize dynamic microstructures. The Berkeley Sensor&Actuator Center (BSAC) has a forefront project aimed at developing these capabilities and at providing high-speed Internet (Supernet) access for remote use of its facilities. Already in operation are three optical-characterization tools: a stroboscopic-interferometer system, a computer-microvision system, and a laser-Doppler vibrometer. This paper describes precision and limitations of these systems and discusses their further development. In addition, we describe the results of experimental studies on the different MEMS devices, and give an overview about high-speed visualization of rapidly moving MEMS structures.

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Christian Rembe, Rishi Kant, and Richard S. Muller "Optical measurement methods to study dynamic behavior in MEMS", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445595

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