Paper
5 April 2001 New approach for 3D full-wave electromagnetic analysis
Igor Balk
Author Affiliations +
Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425375
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
This paper describes a new approach for 3D full-wave electromagnetic analysis using integral equation formulation. The resulting system of equations is suitable for use with Arnoldy based model order reduction. This paper will demonstrate that this approach for modeling of electromagnetic actuated devices is more accurate and about 1000 times faster than traditional methods.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Igor Balk "New approach for 3D full-wave electromagnetic analysis", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425375
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
3D modeling

Electromagnetism

Computer aided design

Microelectromechanical systems

Solid modeling

Chemical elements

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