Position-sensing grating interferometer for a specular object: analysis considering the aberration

Kazuhide Kamiya; Takashi Nomura; Seiichi Okuda; Hatsuzo Tashiro; Kazuo Yoshikawa

doi:10.1117/12.427099

8 May 2001 Position-sensing grating interferometer for a specular object: analysis considering the aberration

Kazuhide Kamiya, Takashi Nomura, Seiichi Okuda, Hatsuzo Tashiro, Kazuo Yoshikawa

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427099
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

The generation theory of interference fringes patterns considering the aberration of the focusing lens is proposed in a position-sensing grating interferometer for a specular object. The proposed theory is based on the assumption that the deformation of the wavefront passing the interferometer is limited by the symmetry of the interferometer and that the wavefront can be expressed by Zernike polynomials. The simulation and experimental results are presented. The interference fringes pattern of the form of a barrel and a spool were obtained by the simulation. The experimental results agreed well with the simulation results.

Citation Download Citation

Kazuhide Kamiya, Takashi Nomura, Seiichi Okuda, Hatsuzo Tashiro, and Kazuo Yoshikawa "Position-sensing grating interferometer for a specular object: analysis considering the aberration", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427099

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