Paper
19 March 2002 Wave-driven molecular discharges as sources of active species
C. M. Ferreira, E. Tatarova, V. Guerra, F. M. Dias, J. Henriques
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Proceedings Volume 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures; (2002) https://doi.org/10.1117/12.459389
Event: Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, 2002, Moscow, Russian Federation
Abstract
In this work we discuss some physical aspects of surface wave driven discharges operating in pure nitrogen N2 and in N2—Ar mixtures, as sources of active species. The developed theoretical models are based on a self-consistent treatment of particle kinetics, wave electrodynamics, gas thermal balance and plasma-wall interactions. By means of optical emission and absorption spectroscopy the population density of the species of interest has been detected. Important problems concerning inhomogeneous wave—to—plasma power transfer, mechanisms of N2 dissociation, creation of ions and metastable particles are discussed in the terms ofthe obtained theoretical and experimental results.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. M. Ferreira, E. Tatarova, V. Guerra, F. M. Dias, and J. Henriques "Wave-driven molecular discharges as sources of active species", Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); https://doi.org/10.1117/12.459389
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