Compensation of convex corners in sensors with bossed structure etched in TMAH and TMAH+IPA solutions

Irena Barycka; Jan Dziuban; Malgorzata Kramkowska; Irena Zubel

doi:10.1117/12.435942

8 August 2001 Compensation of convex corners in sensors with bossed structure etched in TMAH and TMAH+IPA solutions

Irena Barycka, Jan Dziuban, Malgorzata Kramkowska, Irena Zubel

Proceedings Volume 4516, Optoelectronic and Electronic Sensors IV; (2001) https://doi.org/10.1117/12.435942
Event: Optoelectronic and Electronic Sensors IV, 2000, Gliwice, Poland

Abstract

Under etching of convex corners during the fabrication process of pressure sensor with the 'bossed' type structure seriously deteriorates parameters of these devices. The problem can be solved by application of properly designed masks with compensating corners.

Citation Download Citation

Irena Barycka, Jan Dziuban, Malgorzata Kramkowska, and Irena Zubel "Compensation of convex corners in sensors with bossed structure etched in TMAH and TMAH+IPA solutions", Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); https://doi.org/10.1117/12.435942

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