Femtosecond laser ablation and nanostructuring

Boris N. Chichkov; Frank Korte; J. Koch; Stefan Nolte; Andreas Ostendorf

doi:10.1117/12.482099

13 September 2002 Femtosecond laser ablation and nanostructuring

Boris N. Chichkov, Frank Korte, J. Koch, Stefan Nolte, Andreas Ostendorf

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482099
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

At the Laser Zentrum Hannover investigations of possibilities to use femtosecond laser pulses for direct ablative writing and microstructuring of solid materials have been started in 1995. Since then considerable progress in understanding and in the application of different femtosecond technologies has been obtained. At present, we are able to produce high quality microstructuring and large area patterning of solids with structure sizes between one and ten micrometers. By using tightly focused femtosecond pulses it is possible to produce even sub-micrometer structures. In this paper we pursue the goal to find and characterize the limits of femtosecond laser micromachining. Detailed investigations of possibilities to use femtosecond lasers for the sub-wavelength microstructuring of metals and for fabrication of periodic structures in transparent materials with the scale length of the order of several hundreds nanometers are reported.

Citation Download Citation

Boris N. Chichkov, Frank Korte, J. Koch, Stefan Nolte, and Andreas Ostendorf "Femtosecond laser ablation and nanostructuring", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482099

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