Olga V. Makarova,1 Nicolai A. Moldovan,2 Cha-Mei Tang,1 Derrick C. Mancini,2 Ralu Divan,2 Vladislav N. Zyryanov,1 David G. Ryding,2 Judith Yaeger,2 Chian Liu2
1Creatv MicroTech, Inc. (United States) 2Argonne National Lab. (United States)
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We are developing freestanding high-aspect-ratio, focused, two-dimensional antiscatter grids for mammography using deep x-ray lithography and copper electroforming. The exposure is performed using x-rays from bending magnet beamline 2-BM at the Advanced Photon Source (APS) of Argonne National Laboratory. A 2.8-mm-thick prototype freestanding copper antiscatter grid with 25μm-wide parallel cell walls and 550 μm periodicity has been fabricated. The progress in developing a dynamic double-exposure technique to create the grid with the cell walls aligned to a point x-ray source of the mammography system is discussed.
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Olga V. Makarova, Nicolai A. Moldovan, Cha-Mei Tang, Derrick C. Mancini, Ralu Divan, Vladislav N. Zyryanov, David G. Ryding, Judith Yaeger, Chian Liu, "Focused two-dimensional antiscatter grid for mammography," Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); https://doi.org/10.1117/12.451018