Paper
21 November 2002 Focused two-dimensional antiscatter grid for mammography
Olga V. Makarova, Nicolai A. Moldovan, Cha-Mei Tang, Derrick C. Mancini, Ralu Divan, Vladislav N. Zyryanov, David G. Ryding, Judith Yaeger, Chian Liu
Author Affiliations +
Abstract
We are developing freestanding high-aspect-ratio, focused, two-dimensional antiscatter grids for mammography using deep x-ray lithography and copper electroforming. The exposure is performed using x-rays from bending magnet beamline 2-BM at the Advanced Photon Source (APS) of Argonne National Laboratory. A 2.8-mm-thick prototype freestanding copper antiscatter grid with 25μm-wide parallel cell walls and 550 μm periodicity has been fabricated. The progress in developing a dynamic double-exposure technique to create the grid with the cell walls aligned to a point x-ray source of the mammography system is discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Olga V. Makarova, Nicolai A. Moldovan, Cha-Mei Tang, Derrick C. Mancini, Ralu Divan, Vladislav N. Zyryanov, David G. Ryding, Judith Yaeger, and Chian Liu "Focused two-dimensional antiscatter grid for mammography", Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); https://doi.org/10.1117/12.451018
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Cited by 5 scholarly publications.
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KEYWORDS
X-rays

Copper

Photomasks

Polymethylmethacrylate

Mammography

Gold

Plating

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