New technique for Si-based microphotonic components fabrication

Dana Cristea; Elena Manea

doi:10.1117/12.527074

19 November 2003 New technique for Si-based microphotonic components fabrication

Dana Cristea, Elena Manea

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.527074
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

This paper presents the experiments we have performed to obtain microphotonic components using a new technique: the anisotropic wet etching of Si <111>-oriented wafers. The anisotropic etching was combined with an isotropic pre-etch step, followed or not by sidewall passivation. The influence of the mask orientation and layout on the shape and size of the etched cavity was studied and then the masks and the technological process for fabrication of S₃N₄/SiO₂ and c-Si freestanding structures were established. Movable Si₃N₄ micromirrors, SiO₂ or c-Si waveguides were obtained using a low-cost technological process. These components can be further integrated with optoelectronic devices on a silicon substrate.

Citation Download Citation

Dana Cristea and Elena Manea "New technique for Si-based microphotonic components fabrication", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.527074

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available