Object characterization with the differential heterodyne microscope

I. M. Akhmedzhanov; D. V. Baranov; Evgeny M. Zolotov

doi:10.1117/12.530763

19 November 2003 Object characterization with the differential heterodyne microscope

I. M. Akhmedzhanov, D. V. Baranov, Evgeny M. Zolotov

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.530763
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

We demonstrate the characterization of the step-like object (both dielectric and metalized) using the complex response of the scanning differential heterodyne microscope. The experimental investigations were performed for TE- and TM-polarization at various separation intervals between probing beams and compared with calculated results. (Summary only available)

Citation Download Citation

I. M. Akhmedzhanov, D. V. Baranov, and Evgeny M. Zolotov "Object characterization with the differential heterodyne microscope", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.530763

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