Fabrication of microchannels by UV laser ablation

Satoshi Takahashi; Yoshimasa Suzuki; Yoshikazu Yoshida

doi:10.1117/12.486566

19 February 2003 Fabrication of microchannels by UV laser ablation

Satoshi Takahashi, Yoshimasa Suzuki, Yoshikazu Yoshida

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486566
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

This paper describes the fabrication of micro-channels in resin for micro-fluidic devices by a UV laser. Quartz wafers are coated with a 20μm thick BCB resin. Micro-grooves for micro-channels are fabricated into the BCB resin by a KrF excimer laser. The groove bottom is 100m wide at a pulse width of 20nsec, fluence of 1.3mJ/cm²/pulse, and overlap of 98.9%. The wafer surface serves as the bottom face of the groove. Moreover the side wall angle is 72°. Furthermore, the grooves are covered with laminate films to prevent leakage of the liquid samples. A thermoplastic film or a heat-hardening resin film is used as a laminate film. Laminating conditions are: roller temperatures of 120°C, pressure of 0.8MPa, and laminating speed of 0.2m/min. The thermoplastic film coats the groove perfectly. On the contrary, the heat-hardening film does not sag into the groove, resulting in an open-are cross-sectional ration of 80%. Furthermore, the open-area-ratio becomes 100% through a heat-curing process at a temperature of 120°C for 30min. The through holes are made in the laminate film by a KrF excimer laser. Inlet pipe for a micro-pump are inserted into the hole.

Citation Download Citation

Satoshi Takahashi, Yoshimasa Suzuki, and Yoshikazu Yoshida "Fabrication of microchannels by UV laser ablation", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486566

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available