3D inspection by conical wavefronts

L. M. Soroko

doi:10.1117/12.484561

29 July 2002 3D inspection by conical wavefronts

L. M. Soroko

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484561
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

The main problem of the 3D inspection in optical microscopy in the depth scanning, an operation, which is inevitable for point-like and some other objects. Meanwhile for the class of straight-line objects this problem can be solved, if for supporting waves we take conical wavefronts instead of spherical ones. In this case we must use an imaging lens, which has a kink in its generating line. Thus we get natural orientation in space, and a complete elimination of the depth scanning. Due to this productivity of the 3D inspection increases at least by 100-200 times. By means of such radically new imaging lens with kink we can perform selective observation of straight-line objects in space without any depth scanning, through the information about depth coordinate, and the dip angle of this object is not lost. The properties of conical waves will be explained. A microscope, which has been designed for selective observation of "horizontal" straight-line objects oriented approximately perpendicular to the optical axis of this microscope, will be described. For selective observation of "vertical" straight-line objects oriented approximately parallel to the optical axis, another class of microscope has been constructed. We describe also the principle of new optical microscope which enables us to obtain the image of a straight-line object inclined at the angle of ~45° with respect to the optical axis without any depth scanning. The first test model of this optical microscope, in which we use coherent illumination, two traditional imaging lenses and an image transformer is described. The experimental results are presented.

Citation Download Citation

L. M. Soroko "3D inspection by conical wavefronts", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484561

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