Surface profiling method for large aspheres: diffraction image-forming approach

Zhi Li; Yang Zhao; Dacheng Li

doi:10.1117/12.467512

18 October 2002 Surface profiling method for large aspheres: diffraction image-forming approach

Zhi Li, Yang Zhao, Dacheng Li

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467512
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

Investigation of surface profiling method for large aspheres becomes more and more important and imperative with the great development of the synchrotron radiaiton facility (SRF), since the latter puts greater demands on surface quality, shape and figure parameters of the optical elements used in itself. MEanwhile, things became more difficult because of the unique characteristics of the optics used in SRF. As a result, novel surface measurement methods and systems have to be developed to cope with such problems.

Citation Download Citation

Zhi Li, Yang Zhao, and Dacheng Li "Surface profiling method for large aspheres: diffraction image-forming approach", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467512

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