Surface roughness measurement using infrared phase-shifting digital interferometer

Yong He; Lei Chen; Qing Wang; Jingbang Chen

doi:10.1117/12.464060

20 September 2002 Surface Roughness Measurement Using Infrared Phase-Shifting Digital Interferometer

Yong He, Lei Chen, Qing Wang, Jingbang Chen

Proceedings Volume 4927, Optical Design and Testing; (2002) https://doi.org/10.1117/12.464060
Event: Photonics Asia, 2002, Shanghai, China

Abstract

The design of far infrared phase-shifting Twyman-Green interferometer is described in this paper. An IR interferometric method is used to evaluate the surface roughness of ground glass. It is conducted that a rigorous mathematical analysis to describe the contrast of the interference fringes patterns and surface roughness. The experiment is run at the instrument of self-developed interferometer which aperture is Φ 30mm with accuracy better than λ/50 (λ=10.6μm). The mathematical derivation is verified with experimental data obtained from various values of roughness.

Citation Download Citation

Yong He, Lei Chen, Qing Wang, and Jingbang Chen "Surface Roughness Measurement Using Infrared Phase-Shifting Digital Interferometer", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.464060

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