PROCEEDINGS VOLUME 4980
MICROMACHINING AND MICROFABRICATION | 25-31 JANUARY 2003
Reliability, Testing, and Characterization of MEMS/MOEMS II
Editor Affiliations +
MICROMACHINING AND MICROFABRICATION
25-31 January 2003
San Jose, CA, United States
MEMS/MOEMS Reliability Methodology
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478212
Alexander Teverovsky, A. K. Sharma
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472726
Danelle M. Tanner, Michael T. Dugger
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.476345
MEMS/MOEMS Characterization Techniques
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478195
Carolyn D. White, Rui Xu, Xiaotian Sun, Kyriakos Komvopoulos
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.476332
Erik Novak, Michael B. Krell, Trisha Browne
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478204
Failure Modes, Analysis, Tools, and Techniques of MEMS/MOEMS
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.476366
Albert J. Wallash, Larry Levit
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478191
Jeremy A. Walraven, Bernhard Jokiel Jr.
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478207
Peter Gnauck, Peter Hoffrogge
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.476340
Reliability of MEMS Material Surfaces
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.476353
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472729
Michael T. Dugger, Robert J. Hohlfelder, Diane E. Peebles
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478194
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472731
Philippe Dubois, Stephane von Gunten, August Enzler, Urs Lippuner, Alex Dommann, Nicolaas-F. de Rooij
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478200
Reliability and Characterization of MEMS Materials
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472732
Catherine Oropeza, Kun Lian, Wanjun Wang
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478209
Kun Lian, Jiechao Jiang, Zhong Geng Ling, Efstathios I. Meletis
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478193
Christian Lohmann, Andreas Bertz, Matthias Kuechler, Danny Reuter, Thomas Gessner
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472725
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478197
Back End of Line (BEOL) Process
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478205
Danelle M. Tanner, Albert C. Owen Jr., Fredd Rodriguez
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478201
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478208
Matthew G. Hankins, Paul J. Resnick, Peggy J. Clews, Thomas M. Mayer, David R. Wheeler, Danelle M. Tanner, Richard A. Plass
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478206
MEMS Packaging Reliability and Techniques I
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.476331
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472718
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478555
Yufeng Jin, Zhi Ping Wang, L. Zhao, P. C. Lim, J. Wei
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472716
MEMS Packaging Reliability and Techniques II
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478202
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.476338
Yufeng Jin, Zhiping Wang, Zhen Feng Wang, X. Q. Shi, P. C. Lim, Min Miao, X. C. Shan
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472715
Validation, Verification, Qualification, and Nondestructive Evaluation
Ryan Hickey, Heiko Fettig, James Wylde, Stephane J Legros, Robert E. Mallard, Heinz Nentwich, Christopher Hart
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.472728
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478211
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.478210
MEMS/MOEMS Reliability Methodology
Elizabeth Lawrence, Albert K. Henning
Proceedings Volume Reliability, Testing, and Characterization of MEMS/MOEMS II, (2003) https://doi.org/10.1117/12.498239
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