Nodal model for continuous face sheet deformable mirrors

Alexandros P. Papavasiliou

doi:10.1117/12.477917

20 January 2003 Nodal model for continuous face sheet deformable mirrors

Alexandros P. Papavasiliou

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.477917
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

This work presents a nodal model for continuous face sheet deformable mirrors that can be solved quickly on a desktop computer. This network of simple cubic stiffening elements can more accurately simulate deflections resulting from complex loading conditions than a membrane model and is much easier to implement than a non-linear finite element model. The deflections predicted by the model are compared to expected behavior and to FEM results for a simple system. While restoring forces due to pre-stress and deformation-induced stress are fairly accurately modeled, resistance due to bending is only accurately modeled for specialized devices.

Citation Download Citation

Alexandros P. Papavasiliou "Nodal model for continuous face sheet deformable mirrors", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); https://doi.org/10.1117/12.477917

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