Optimization of polishing processes by using iTIRM for in situ monitoring of surface quality

Mark Meeder; Thomas Mauret; Silvia M. Booij; Joseph J. M. Braat; Oliver W. Faehnle

doi:10.1117/12.503679

22 December 2003 Optimization of polishing processes by using iTIRM for in situ monitoring of surface quality

Mark Meeder, Thomas Mauret, Silvia M. Booij, Joseph J. M. Braat, Oliver W. Faehnle

Proceedings Volume 5180, Optical Manufacturing and Testing V; (2003) https://doi.org/10.1117/12.503679
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. Experiments are done to test the applicability for qualifying and optimizing finishing processes for optical surfaces. Several optical glasses, different polishing agents and ductile grinding are included in these experiments. It is concluded that iTIRM can be used for both mentioned applications but that it is, at least for now, an R&D tool only and not applicable in production.

Citation Download Citation

Mark Meeder, Thomas Mauret, Silvia M. Booij, Joseph J. M. Braat, and Oliver W. Faehnle "Optimization of polishing processes by using iTIRM for in situ monitoring of surface quality", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); https://doi.org/10.1117/12.503679

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