Photo-induced surface relief on Azo polymer for optical component fabrication

Takashi Fukuda; Chang-Dae Keum; Hiro Matsuda; Kiyoshi Yase; Kaoru Tamada

doi:10.1117/12.508289

3 November 2003 Photo-induced surface relief on Azo polymer for optical component fabrication

Takashi Fukuda, Chang-Dae Keum, Hiro Matsuda, Kiyoshi Yase, Kaoru Tamada

Author Affiliations +

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.508289
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

With respect to the manufacturing of optical elements, facile and effective fabrication method is proposed. It is developed in connection with photo-induced surface relief (PSR)formation phenomenon that occurs on the azobenzene functionalized polymer film. Purely optically inscribed surface relief structures have been used as a plastic mold for manufacturing of its replica. At least a hundred times replication process has been achieved using thermosetting resin without any deterioration. This method has many merits not only from a technical viewpoint but also from a economical efficiency. In this report,first the PSR phenomenon is explained and then several examples for optical component fabrication are demonstrated.

Citation Download Citation

Takashi Fukuda, Chang-Dae Keum, Hiro Matsuda, Kiyoshi Yase, and Kaoru Tamada "Photo-induced surface relief on Azo polymer for optical component fabrication", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.508289

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