Infrared pyroelectric detector based on the system's thin-Pd-film/thick-lithium-niobate substrate implanted by Ar+ ions

Viktor O. Lysyuk; Vasiliy S. Staschuk; Mykola I. Kluy; Leonid V. Poperenko

doi:10.1117/12.509634

8 December 2003 Infrared pyroelectric detector based on the system's thin-Pd-film/thick-lithium-niobate substrate implanted by Ar⁺ ions

Viktor O. Lysyuk, Vasiliy S. Staschuk, Mykola I. Kluy, Leonid V. Poperenko

Author Affiliations +

Proceedings Volume 5209, Materials for Infrared Detectors III; (2003) https://doi.org/10.1117/12.509634
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The special technology of development of pyroelectric detectors on a base of the systems "thin Pd film -- thick lithium niobate substrate" is proposed. The processing of such system by Ar⁺ ions is proposed for improving some characteristics of material for pyroelectric detector. The optimal Pd film thicknesses as well as ions energies and doses were calculated by Monte-Carlo method for reaching appropriate sensitivity and response of pyroelectric detectors. Investigation of surface structure of the systems by electronic microscopy and AFM method has shown that structural changes of the researched materials depend on film's material and its properties. This result is confirmed by ellipsometric study of the systems. The optical properties of nonimplanted and implanted systems "thin Pd film -- thick lithium niobate substrate" are investigated in the wide spectral range (200 nm - 15 μm). It is shown that the reflectance of the implanted system is nonselective in the infrared. The adhesion and antidegradation stability of metal films on bulk lithium niobate increase after implantation. The selection criteria for finding of appropriate film materials for application in modern optoelectronic devices are proposed.

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Viktor O. Lysyuk, Vasiliy S. Staschuk, Mykola I. Kluy, and Leonid V. Poperenko "Infrared pyroelectric detector based on the system's thin-Pd-film/thick-lithium-niobate substrate implanted by Ar⁺ ions", Proc. SPIE 5209, Materials for Infrared Detectors III, (8 December 2003); https://doi.org/10.1117/12.509634

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