Model-based fault detection and metrology error rejection in registration APC system

Ziqiang John Mao; Issi Geier

doi:10.1117/12.536810

29 April 2004 Model-based fault detection and metrology error rejection in registration APC system

Ziqiang John Mao, Issi Geier

Proceedings Volume 5378, Data Analysis and Modeling for Process Control; (2004) https://doi.org/10.1117/12.536810
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

After we implemented the run-to-run feedback control system for lithographic stepper registration, we found that the metrology error introduced wrong control signals which drove the process away from normal operation. This paper presents methods of model-based fault detection and metrology error rejection. We use the fault detection method to monitor the health of run-to-run system and apply the error rejection method to proactively correct control signal to ensure the desired targets. Comparing to the old run-to-run system used in litho process that only provides warning limits and hard limits with fixed thresholds on individual physical variables, the proposed fault detection method is more sensitive to detect drift, shift and out-of-control points. It could have detected a real problem much quicker if this method was used. The error rejection method is very powerful to handle metrology errors as well as shift and drift by using the estimated output instead of the measured output. The experiments on the real data and simulation data validate the usefulness of the method.

Citation Download Citation

Ziqiang John Mao and Issi Geier "Model-based fault detection and metrology error rejection in registration APC system", Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); https://doi.org/10.1117/12.536810

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available